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Ellipsometer
Jobin-Yvon Uvisel spectroscopic ellipsometer |
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AFM/Nano-indenter
Atomic Force Microscope fitted with Hysitron nano-indenter |
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CVC
RF sputtering deposition equipment |
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SEM
Scanning Electron Microscope and EDX analysis |
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Microdyn
Commercial scale microwave-assisted reactive sputtering |
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Satis Plasma-assisted
E-beam
This is a commercial-scale system for thin film deposition, with two
electron beam hearths and a plasma-assist source |
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KSV Instruments Contact-angle equipment |
